Aisin's cryopumps consist of a separatecompressor unit and a GM refrigerator which has an improved va**emechanism.
日本爱信低温泵系统包括两个独立分开的压缩机和GM原理制冷机。
High Productivity **
High Productivity has been achieved by developing a high-outputrefrigerator with a long regeneration cycle, high throughputoperation, and reduced cool-down time.
通过研发出来的**制冷机,实现了**:很长的再生周期,高产量,较短的降温时间。
Simple Maintenance维护简便
Maintenance has been simplified. Va**es do not requireadjustment. In addition to va**es, some components do not requireadjustment.
维修简化。(进**)阀不需要调整,其它一些组件也是如此(编者注:比如深度)。
High-Performance Compressor Unit**(*气)压缩机
The cryopump utilizes a high-capacity compressor and ahigh-performance oil separator to acheive long-term stablerefrigeration output and long life for theadsorber.低温泵利用**(*气)压缩机和**油气分离器,获得了持久稳定的制冷(功率)输出,同时也提高了吸附器的使用期限。
High Reliability高可靠性
Stable discharge characteristics have been achieved byusing highly reliable seals, drive units, and va**e mechanisms andby optimizing the panelshape.通过应用超高稳定的密封圈(编者注:尤其是一级蓄冷器密封),驱动单元,“进**”阀机构,和优化面板形状,获得了稳定的排气(或者说“抽气”)性能。
Low-Vibration Pump Unit低振动
Uses a small, special three-phase motor, reduces vibrations to1/40 of the convectional poduct( two-phases motor).应用了小型三相电机,其振动只有传统电机(两相电机)的1/40。(编者注:三相电机是各个厂家的发展趋势,显著优势是振动小)。
Applications应用
Ion implanter for semiconductors, liquid crystal, vapordeposition equipment and so on. 半导体的离子注入、液晶、气相沉积(编者注:蒸发或溅射)。