Features
- Wide Range Vacuum Gauge (760 to1x10-9 Torr)
- Seamless measurement from atmospheric pressure
to UHV on a single vacuum port - 0-10VDC Analog Output
- RS485 digital communications
- Three Adjustable Set Points
- Digital Display, read in Torr, Mbar or Pa
- Power with 24VDC
- Small Size: 3.7” x 2.75” x 6.3”
- CE Certified
Typical Product Applications
- Physical Vapor Deposition
- Optical & Functional Thin Films
- Molecular Beam Epitaxy
- Accelerators & UHV Research
- Electron Device Manufacture
- Optoelectronic Device Manufacture
The CC-10 is a self-contained compact gauge and controller designedto replace multiple conventional vacuum gauges by incorporating thelatest sensor technology to permit seamless measurement of twelvedecades of pressure. This gauge uses dual sensor technology. Roughvacuum, from atmospheric pressure to 10-2 Torr ismeasured using a crystal sensor, while pressure from10-2 Torr to 1 x 10-9 Torr ismeasured with a double inverted magnetron cold cathode sensor. Alloperating parameters are easily addressed and checked from themembrane panel on the front of the electronics module. A blue-greensegmented LED provides pressure indication. Discrete LEDs indicatestatus for each of the three set point relays. The CC-10 offers theuser the choice of both analog and digital communication as astandard feature.
特点
宽量程真空计(760〜1×10 -9乇)
无缝测量大气压力
UHV单真空端口
0-10VDC模拟量输出
RS485数字通信
三个可调的设定点
数字显示,乇,毫巴或帕
24VDC电源
小尺寸:3.7“×2.75”×6.3“