MicroLine-300是一款桌上型半自动CD测量系统。
主要技术参数:
◆ 测量范围(XYZ):标准:200×200×25mm;可选:300x300x25
◆ 视场内测量精度:10nm(100X 镜头);Z轴聚焦范围:25 mm
◆ 视场内测量范围:0.5um~400um;
◆ 视场内测量重复性(100x 物镜): 晶圆上 掩模板上0.005um(1δ);
◆ 承重:2kg
◆ 标配镜头10x,可选镜头:5X,20X, 50X, 100X
MicroLine 系列主要用于测量半导体、MEMS 晶圆、光刻掩模板等尺寸和涂覆物(多层套刻、圆、对接误差等)量测。
MicroLine 临界尺寸测量系统设计应用于半导体和MEMS晶圆以及光掩模CD量测。Microline 系列可自动测量线宽,迭置重合,和其他关键尺寸。
MicroLine装备有高性能光学显微镜,高精度运动平台,可测量0.5 微米到400 微米大小的产品,测量精度和重复性在10nm (1 σ ,100倍物镜)。
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